Item | Unit | Specifications | |
---|---|---|---|
Crystal Growth Method | CZ/VGF | ||
Type | N-type | P-type | |
Dopant | As, Sb | Ga | |
Diameter | inch | 2-6 | |
Surface Orientation | (100) ± 0.5° | ||
Off Orientation | US, EJ | ||
Thickness | μm | (175-500) ± 25 | |
Resistivity | Ω·cm | 0.005-30 | 0.005-0.04 |
Dislocation Density (EPD) | cm2 | - | 0 |
TTV | μm | ≤15 | ≤15 |
Warp | μm | ≤25 | ≤25 |
Back Surface Roughness (Ra) | μm | <0.1 | <0.1 |
Surface Finish | Front Surface/Back Surface | Mirror/Etching, Etching/Etching | |
Packaging Method | Coin Roll/Cassette Case |