Ga₂O₃ Wafer

We Provide Ga₂O₃ Products.

  • 10 × 10 Ga₂O₃ Square Substrate
  • 1-inch Ga₂O₃ Wafer
  • 2-inch Ga₂O₃ Wafer
  • 4-inch Ga₂O₃ Wafer
  • Ga₂O₃ Seed Crystal

Gallium oxide is widely used as a power electronics device, leveraging its high voltage resistance and low on-resistance characteristics. It is used in various applications such as electric vehicles, solar power inverters, high-speed rail power transmission, and has potential possibilities in other fields as well.
The bandgap of gallium oxide reaches 4.85eV, and it has excellent transmittance in the visible light wave range. This makes it applicable in fields such as solar-blind ultraviolet exploration and radiation exploration.
The low mismatch characteristics of gallium oxide single crystals and GaN are utilized in the growth of GaN, which is expected to be used in the production of high-performance high-frequency devices for 5G communication applications.

10 × 10 Ga₂O₃ Square Substrate

10 × 10 Ga₂O₃ Square Substrate
Item Specification
Crystal Orientation (100)
Dopant UID Sn Mg/Fe
Resistivity 1016-1017 cm-3 >1018 cm-3 ≥1010 Ω·cm
FWHM (arcsec) ≤150
Dislocation Density <1 × 105 cm-2
Size A-B C-D Thickness
10 mm 10.5 mm 0.5(±0.02) mm
Reference Long side: [010]
Surface Single-sided mirror/Double-sided mirror
Ra < 0.5 nm
Crystal surface deviation < ±1°

1-inch & 2-inch Ga₂O₃ Wafer

1-inch & 2-inch Ga₂O₃ Wafer
Item Specification
Crystal Orientation (100)
Dopant UID Sn Mg/Fe
Nd-Na/Resistivity 1016-1017 cm-3 >1018 cm-3 ≥1010 Ω·cm
FWHM (arcsec) ≤150
Dislocation Density <1 × 105 cm-2
Size Diameter Thickness
25.4/50.8 ± 0.5 mm 0.65 ± 0.02 mm
Reference [010]
Surface Single-sided mirror/Double-sided mirror
Ra < 0.5 nm
Crystal surface deviation < ±1°

4-inch Ga₂O₃ Wafer

4-inch Ga₂O₃ Wafer
Item Specification
Crystal Orientation (100)
Doping UID Sn Mg
Nd-Na/Resistivity 1016-1017 cm-3 >1018 cm-3 ≥1010 Ω・cm
FWHM (arcsec) ≤150
Dislocation Density <1 × 105 cm-2
Size Diameter Thickness
100.0 ± 0.5 mm 0.65 ± 0.02 mm
Reference [010]
Surface Single-sided mirror/Double-sided mirror
Ra < 0.5 nm
Crystal surface deviation < ±1°

Ga₂O₃ Seed Crystal

Ga₂O₃ Seed Crystal
Item Specification
Crystal Orientation Long-side Direction (100)
Doping UID/Fe/Mg
FWHM (arcsec) ≤150
Dislocation Density ≤2 × 104 cm-2
Size A-B C-D Length
4-7 mm 4-7 mm 30-100 mm
Surface Cutting Surface
Crystal surface deviation < ±1°