Project | Unit | LD Application Product Specification | LED Application Product Specification | Microelectronics Product Specification |
---|---|---|---|---|
Conductivity Type | N-type | P-type/N-type | ||
Crystal Growth Method | VGF | VGF | VGF | |
Dopant | Si | Zn/Si | Undoped | |
Diameter | inch | 2-6 | 2-6 | 2-6 |
Surface Orientation | (100) ± 0.1° | (100) ± 0.5° | (100) ± 0.5° | |
Off Orientation | US or EJ | US or EJ | US, EJ or notch | |
Carrier Concentration | cm-3 | (0.4-2.5) × 1018 | (0.5-5) × 1019 (0.4-4) × 1018 |
|
Resistivity | Ω·cm | (1.2-9.9) × 10-3 | (1.2-9.9) × 10-3 | >107 |
Electron Mobility (Mob) | cm2/v.s | >1500 | 50-120/>1000 | >4000 |
Dislocation Density (EPD) | cm2 | <500 | <5000 | <5000 |
Thickness | μm | (350-650) ± 25 | (350-650) ± 25 | (350-650) ± 25 |
TTV (P/P) | μm | ≤5 | ≤5 | ≤4 |
TTV (P/E) | μm | ≤10 | ≤10 | ≤10 |
Warp | μm | ≤10 | ≤10 | ≤10 |
Surface Finishing | Surface Backside |
Mirror Mirror/Etching |
Mirror Mirror/Etching |
Mirror Mirror/Etching |
Packing Method | Coin Roll/Cassette Case | Coin Roll/Cassette Case | Coin Roll/Cassette Case |