Particle Controlled Product
We provide particle-controlled products of various sizes.
Item | Standard | |||
---|---|---|---|---|
Growth Method | CZ | |||
Inch | 5” | 6” | 8” | 12” |
Thickness | 625±25um | 625±25um 675±25um |
725±25um | 775±25um |
Crystal Orientation | <100> / <111> / <110> / no preference | |||
Notch orientation | <100> / <111> / <211> / no preference | |||
Front Side | MP | MP | MP | MP |
Back Side | ET | ET | ET | MP |
Type・Dopant | P-type | |||
Resistivity | 1-100ohm-cm | |||
Orientation Flat or Notch | Orifura | Orifura or Notch | Orifura or Notch | Notch |
Particle | 0.037≦50 ~ 0.3um≦10 | |||
Surface Metal (atoms/cm2) | Fe, Cr, Ni, Cu, Zn, K, Na, Ca, Al ≤1E10 or ≤5E10 | |||
Quantity (atoms/cm2) | 25 sheets/case | |||
Packaging type | Aluminum pack, Shrink | |||
Remarks |
1. Please inquire for the resistance value you specify. 2. Particles: Please inquire for the particles you specify. 3. Surface metal contamination (Please inquire for the line guarantee you specify). 4. If you have any other requests, please feel free to inquire. |