SiC Wafer

We offer monocrystalline SiC wafer products.

  • 2-4 inch 4H/6H-P SiC wafers.
  • 2-4 inch 3C SiC wafers.
  • 4-8 inch 4H-N SiC wafers.
  • 4-8 inch 4H-Semi-insulating SiC wafers.
  • 4-8 inch SiC ingots.

The use of SiC Wafers is expected to increase in the future for power devices.
In addition to 2, 4, 6, and 8 inches, we also handle substrates from 5mm square to 10mm square.

SiC Wafer Products

Inch Type Off Angle Grade Number of Micropipes Thickness Surface Finish
4 inches 4H-N 4°±0.5° Prime ≤0.2cm-2 350±25μm Si face: CMP finish
C face: Optical mirror finish (Mirror)
Production
Dummy ≤10cm-2
4H-Semi-insulating 0°±0.2° Prime ≤1cm-2 500±25um Si face: CMP finish
C face: Optical mirror finish (Mirror)
Production ≤5cm-2
Dummy ≤10cm-2
6 inches 4H-N 4°±0.5° Prime ≤0.2cm-2 350±25μm Si face: CMP finish
C face: Optical mirror finish (Mirror)
Production
Dummy ≤1cm-2
4H-Semi-insulating 0°±0.2° Prime ≤1cm-2 500±25um Si face: CMP finish
C face: Optical mirror finish (Mirror)
Production ≤5cm-2
Dummy ≤10cm-2
8 inches 4H-N 4°±0.5° Prime ≤1cm-2 500±25um Si face: CMP finish
C face: Optical mirror finish (Mirror)
Production ≤5cm-2
Dummy ≤5cm-2
Inch Type Off Angle Grade Number of Micropipes Thickness Surface Finish
2 inches 4H-P 2.0°-4.0°±0.5° Production ＜0.1cm-2 350±25μm
2.0°-4.0°±0.5° Dmmy ＜0.1cm-2 350±25μm
6H-P 2.0°-4.0°±0.5° Production ＜0.1cm-2 350±25μm
2.0°-4.0°±0.5° Dmmy ＜0.1cm-2 350±25μm
3C-N <0001>±0.5° Production ＜0.1cm-2 350±25μm
<0001>±0.5° Dmmy ＜0.1cm-2 350±25μm
4 inches 4H-P 2.0°-4.0°±0.5° Production ＜0.1cm-2 350±25μm
2.0°-4.0°±0.5° Dmmy ＜0.1cm-2 350±25μm
6H-P 2.0°-4.0°±0.5° Production ＜0.1cm-2 350±25μm
2.0°-4.0°±0.5° Dmmys ＜0.1cm-2 350±25μm
3C-N <0001>±0.5° Production ＜0.1cm-2 350±25μm
<0001>±0.5° Dmmy ＜0.1cm-2 350±25μm
5mm×5mm 4H-P 2.0°-4.0°±0.5° Production ＜0.1cm-2 350±25μm
6H-P 2.0°-4.0°±0.5° Production ＜0.1cm-2 350±25μm
3C-N <0001>±0.5° Production ＜0.1cm-2 350±25μm
10mm×10mm 4H-P 2.0°-4.0°±0.5° Production ＜0.1cm-2 350±25μm
6H-P 2.0°-4.0°±0.5° Production ＜0.1cm-2 350±25μm
3C-N <0001>±0.5° Production ＜0.1cm-2 350±25μm

SiC Ingot

SiC Ingot Products

Type Off Angle Grade Micropipe Count Thickness Surface Finish
SiC Ingot 4 inches 4H-N 4°±0.5° Dummy ≤50cm-2 ・10～14.9mm
(Thickness A type)
・15～19.9mm
(Thickness B type)
・20～25mm
(Thickness C type) 		Circular peripheral processing available
Primary/secondary orientation flat available
6 inches 4H-N
8 inches 4H-N