SiC Wafer
We offer monocrystalline SiC wafer products.
- 2-4 inch 4H/6H-P SiC wafers.
- 2-4 inch 3C SiC wafers.
- 4-8 inch 4H-N SiC wafers.
- 4-8 inch 4H-Semi-insulating SiC wafers.
- 4-8 inch SiC ingots.
The use of SiC Wafers is expected to increase in the future for power devices.
In addition to 2, 4, 6, and 8 inches, we also handle substrates from 5mm square to 10mm square.
SiC Wafer Products
| Inch | Type | Off Angle | Grade | Number of Micropipes | Thickness | Surface Finish |
|---|---|---|---|---|---|---|
| 4 inches | 4H-N | 4°±0.5° | Prime | ≤0.2cm-2 | 350±25μm | Si face: CMP finish C face: Optical mirror finish (Mirror) |
| Production | ||||||
| Dummy | ≤10cm-2 | |||||
| 4H-Semi-insulating | 0°±0.2° | Prime | ≤1cm-2 | 500±25um | Si face: CMP finish C face: Optical mirror finish (Mirror) |
|
| Production | ≤5cm-2 | |||||
| Dummy | ≤10cm-2 | |||||
| 6 inches | 4H-N | 4°±0.5° | Prime | ≤0.2cm-2 | 350±25μm | Si face: CMP finish C face: Optical mirror finish (Mirror) |
| Production | ||||||
| Dummy | ≤1cm-2 | |||||
| 4H-Semi-insulating | 0°±0.2° | Prime | ≤1cm-2 | 500±25um | Si face: CMP finish C face: Optical mirror finish (Mirror) |
|
| Production | ≤5cm-2 | |||||
| Dummy | ≤10cm-2 | |||||
| 8 inches | 4H-N | 4°±0.5° | Prime | ≤1cm-2 | 500±25um | Si face: CMP finish C face: Optical mirror finish (Mirror) |
| Production | ≤5cm-2 | |||||
| Dummy | ≤5cm-2 |
| Inch | Type | Off Angle | Grade | Number of Micropipes | Thickness | Surface Finish |
|---|---|---|---|---|---|---|
| 2 inches | 4H-P | 2.0°-4.0°±0.5° | Production | ＜0.1cm-2 | 350±25μm | |
| 2.0°-4.0°±0.5° | Dmmy | ＜0.1cm-2 | 350±25μm | |||
| 6H-P | 2.0°-4.0°±0.5° | Production | ＜0.1cm-2 | 350±25μm | ||
| 2.0°-4.0°±0.5° | Dmmy | ＜0.1cm-2 | 350±25μm | |||
| 3C-N | <0001>±0.5° | Production | ＜0.1cm-2 | 350±25μm | ||
| <0001>±0.5° | Dmmy | ＜0.1cm-2 | 350±25μm | |||
| 4 inches | 4H-P | 2.0°-4.0°±0.5° | Production | ＜0.1cm-2 | 350±25μm | |
| 2.0°-4.0°±0.5° | Dmmy | ＜0.1cm-2 | 350±25μm | |||
| 6H-P | 2.0°-4.0°±0.5° | Production | ＜0.1cm-2 | 350±25μm | ||
| 2.0°-4.0°±0.5° | Dmmys | ＜0.1cm-2 | 350±25μm | |||
| 3C-N | <0001>±0.5° | Production | ＜0.1cm-2 | 350±25μm | ||
| <0001>±0.5° | Dmmy | ＜0.1cm-2 | 350±25μm | |||
| 5mm×5mm | 4H-P | 2.0°-4.0°±0.5° | Production | ＜0.1cm-2 | 350±25μm | |
| 6H-P | 2.0°-4.0°±0.5° | Production | ＜0.1cm-2 | 350±25μm | ||
| 3C-N | <0001>±0.5° | Production | ＜0.1cm-2 | 350±25μm | ||
| 10mm×10mm | 4H-P | 2.0°-4.0°±0.5° | Production | ＜0.1cm-2 | 350±25μm | |
| 6H-P | 2.0°-4.0°±0.5° | Production | ＜0.1cm-2 | 350±25μm | ||
| 3C-N | <0001>±0.5° | Production | ＜0.1cm-2 | 350±25μm |
SiC Ingot
SiC Ingot Products
| Type | Off Angle | Grade | Micropipe Count | Thickness | Surface Finish | |
|---|---|---|---|---|---|---|
| SiC Ingot | 4 inches 4H-N | 4°±0.5° | Dummy | ≤50cm-2 |
・10～14.9mm (Thickness A type) ・15～19.9mm (Thickness B type) ・20～25mm (Thickness C type) |
Circular peripheral processing available Primary/secondary orientation flat available  |
| 6 inches 4H-N | ||||||
| 8 inches 4H-N |