Acidified Zinc Oxide ZnO

Piezoelectric sensors, SAW devices, LEDs, scintillators, ultraviolet sensors, transistors, and other applications make zinc oxide a highly valuable material for next-generation semiconductors.

ZnO·C Plate Substrate Standard Specifications (+C Region)

※ The above measurement values are representative values and are not guaranteed.
Surface Orientation 0001 Plate (C-Plane, +C Region)
Dimensions: 10mm Substrate: 10.0 mm ± 0.2 × 10.0 mm ± 0.2, t = 0.5 mm ± 0.2
20mm Substrate: 20.0 mm ± 0.2 × 10.0 mm ± 0.2, t = 0.5 mm ± 0.2
Angle 0.0° ± 0.5° for each axis direction
Surface Finish Double-sided Polished Finish
Surface Roughness RMS < 1.0nm
Impurity Concentration Fe: 0.30 wt%, Li: 0.61 wt%, Al: <0.20 wt%, Ca: 0.11 wt%, Mg: 0.38 wt%, K: 0.82 wt%, Cr: <0.20 wt%
Ni: 0.65 wt%, Na: 0.09 wt%, Ga: 0.16 wt%, Mo: <0.01 wt%, V: <0.01 wt%, Cu: 0.03 wt%
Mobility 100～200 cm2/(V·s)
Carrier Concentration 1E+15～16cm3
Resistivity 0.1～10kΩcm
Crystallinity FWHM (0002) < 25 arc seconds

Standard Size

Product Size
Wafer 10 × 10 × 0.5 mm
20 × 20 × 0.5 mm
Block 10 × 10 × 5～7 mm