Silicon Materials (for Component Processing)

Large-Diameter Silicon Ingot

We provide high-purity silicon components for semiconductor manufacturing equipment.
With excellent plasma resistance, low particle generation characteristics, and high-precision processing, our products support semiconductor manufacturing processes such as dry etching equipment.

Features

  • Supports large-diameter sizes
  • High-purity silicon of 6N or higher
  • Excellent uniformity and stable quality
  • Customizable sizes and specifications
  • Ideal as processing material for semiconductor manufacturing equipment components

Applications

  • Silicon components for dry etching equipment
  • Material for focus ring processing
  • Material for silicon electrode processing
  • Material for silicon ring processing
  • Precision component processing for semiconductor manufacturing equipment
Diameter Type / Crystal Orientation Resistivity (Ω·cm) Length
Φ200–Φ550 mm P-type / <100> / <111> 1–4 Customizable
Diameter Purity Resistivity (Ω·cm) Length
Φ200–Φ850 mm 6N or higher 1–10 Customizable