Coated Wafer
A product that has undergone a film addition process to the wafer is called a "coated wafer". The wafer film process includes interlayer insulating materials as insulating films, metal films as conductive materials, resists as process materials, and protective films.
3-4 inch coated silicon wafer
The following is a list of sputtering targets we have. It is possible to create coated wafers with any combination.
| METALS | The materials you provided are: Au, Al, Ag, B, C, Co, Cr, Cu, Fe, Ge, Hf, In, Ir, Mg, Mn, Mo, Nb, Ni, Pd, Pt, Rh, Ru, Si(N-type)(1-50Ω･cm), Si(P-type)(1-50Ω･cm), Si(N-type)(high resistance)(1000Ω･cm and above), Si(N-type)(high resistance)(5000Ω･cm and above), Sn, Ta, Ti, V, W, Y, Zn, Zr. |
|---|---|
| SILICIDES | CoSi2、MoSi2.5、NiSi2、TaSi2、TiSi2、WSi2、WSi2.5、ZrSi2、CrSi2 |
| NITRIDES | AlN、BN、Mo2N、Si3N4、ZrN |
| CARBIDES | SiC、TiC |
| ALLOYS | Al-Cu、Al-Nd、Al-Sc、Al-Si、Al-Si-Cu、Al-Ti、Au-Sn、Cu-Ni、Co-Cr、Fe-Co、Ni-Cr、Ni-Fe、Ni-V、TiW |
| OXIDES | Al2O3、AZO、BaTiO3、CeO2、CuO、Fe2O3、Ga2O3、Gd2O3、HfO2、In2O3、ITO、IZO、LiCoO2、LiMn2O4、LiNbO3、Li3PO4、MgO、Mn2O3、Nb2O5、NiO、PZT、RuO2、SiO、SiO2、SnO、SnO2、SrRuO3、SrTiO3、Ta2O5、TiO2、WO3、Y2O3、ZnO、ZrO2 : Y2O3 |
4-6 inch thermal oxide coated wafer
| Specifications | ||
|---|---|---|
| Size | 4 inches | 6 inches |
| Diameter | 100±0.5mm | 150±0.5mm |
| Conductive Type | P-type | |
| Resistance Value | 1-100Ω・cm | |
| Thickness | 525±25μm | 625±25μm |
| Thermal Oxide Film Thickness | 500nm±10％ | |
| Quantity | From 25 pieces | |
- Special Notes
-
- SPlease note that we cannot guarantee the grade of the i-wafer, particles, etc.
- Regarding the bevel, it is basically a full round edge, but we cannot guarantee it. The Si wafer delivered will be a SEMI Standard product.
- ※This is not a stock item. Delivery will take approximately 10 to 14 days after the order is placed.
4-6 inch thermally oxidized film 10000Å (both sides) Si wafer
| Specifications | ||
|---|---|---|
| Size | 4 inches | 6 inches |
| Diameter | 100±0.2㎜ | 150±0.2㎜ |
| Thickness | 525±25μm | 625±25μm |
| Conductive Type | P-type | |
| Surface Condition | One side mirror / One side etched | |
| Resistance Value | 1-100Ω・cm | |
| Thermal Oxide Film Thickness | 10000ű10％ | |
| Quantity | From 25 sheets | |
- Special Notes
-
- Please note that we cannot guarantee the grade or particles of the Si wafer.
- Regarding the bevel, it is basically a full round edge, but we cannot guarantee this. The Si wafer delivered will be a SEMI Standard product.
- ※This is not a stock item. Delivery will take about 10 to 14 days after receiving the order.
6-inch thermal oxide film 20000Å (both sides) Si wafer
| Specifications | |
|---|---|
| Size | 4 inches |
| Diameter | 150±0.2㎜ |
| Thickness | 625±25μm |
| Conductive Type | P-type |
| Surface Condition | One side mirror/One side etched |
| Resistance Value | 1-100Ω・cm |
| Thermal Oxide Film Thickness | 20000ű10％ |
| Quantity | From 25 sheets |
- Special Notes
-
- Please note that we cannot guarantee the grade or particles of the Si wafer.
- Regarding the bevel, it is basically a full round edge but we cannot guarantee it. The Si wafer delivered will be a SEMI Standard product.
- ※Please note that this is not a stock item. Delivery time is approximately 10 to 14 days after receipt of the order.
6-inch thermally oxidized film 100000Å (both sides) Si wafer
| Specifications | |
|---|---|
| Size | 6 inches |
| Diameter | 150±0.2㎜ |
| Thickness | 625±25μm |
| Conductive Type | P-type |
| Surface Condition | One side mirror / One side etched |
| Resistance value | 1-100Ω・cm |
| Thermal Oxide Film Thickness | 100000ű10％ |
| Quantity | From 25 pieces |
- Special Notes
-
- Please note that we cannot guarantee the grade, particles, etc. of the Si wafer.
- Regarding the bevel, it is basically a full round edge, but we cannot guarantee it. The Si wafer to be delivered will be a SEMI Standard product.
- ※This is not a stock item. Delivery will take about 8-9 weeks after receiving the order.
- ※Because this is a specially ordered thick film product, we do not guarantee the adhesion of the film, etc.